发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device in which an element formation region occupies less area and which uses a CMOS SGT.SOLUTION: A semiconductor device comprises: first and second columnar silicon layers 504, 505; a first gate insulation film 506 formed around the first columnar silicon layer; a first gate electrode 303 formed around the first gate insulation film; a second gate insulation film 506 formed around the second columnar silicon layer; a second gate electrode 304 formed around the second gate insulation film; first gate wiring 305 connected to the first and second gate electrodes; a first n-type diffusion layer 524 formed on an upper part of the first columnar silicon layer; a second n-type diffusion layer 502 formed on a lower part of the first columnar silicon layer; a first p-type diffusion layer 525 formed on an upper part of the second columnar silicon layer; and a second p-type diffusion layer 503 formed on a lower part of the second columnar silicon layer. A center line extending along the first gate wiring is off set by a first predetermined amount with respect to a line linking the center of the first columnar silicon layer and the center of the second columnar silicon layer.
申请公布号 JP2015167258(A) 申请公布日期 2015.09.24
申请号 JP20150107514 申请日期 2015.05.27
申请人 UNISANTIS ELECTRONICS SINGAPORE PTE LTD 发明人 MASUOKA FUJIO;HARADA NOZOMI;NAKAMURA HIROKI
分类号 H01L21/8238;H01L21/768;H01L21/8244;H01L27/092;H01L27/11 主分类号 H01L21/8238
代理机构 代理人
主权项
地址