| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a CIS inspection measurement device for measuring an inspection object while a CIS is made to face it in non-contact.SOLUTION: The CIS inspection measurement device includes: a CIS(Contact Image Sensor) disposed so as to face an inspection object; a first telescopic mechanism as a mechanism for adjusting the focus of the CIS on the inspection object; a second telescopic mechanism as a mechanism for controlling the parallelism between the CIS and the inspection object; and a calibration mechanism that is disposed at a position facing a lens of the CIS, has a reference white board, and corrects variation in sensitivity of the CIS by adjusting the white level and black level.</p> |
