发明名称 |
WORKPIECE HOLDER AND METHOD USING SAME FOR DETECTING LATERAL DISPLACEMENT OF WORKPIECE |
摘要 |
Provided are a workpiece holding apparatus capable of detecting lateral displacement of a workpiece (w) in a planar direction, and a method of detecting lateral displacement of a workpiece (w) with use of the workpiece holding apparatus. The workpiece holding apparatus, which is configured to hold the workpiece (w), with an adhesive pad (2) mounted on a support plate, includes: a capacitance measuring device (5) including an electrode pair formed of first and second electrodes (3a, 3b) and arranged at least at a part of a position corresponding to a peripheral edge portion of the workpiece (w), the capacitance measuring device (5) being configured to measure capacitance of the electrode pair; and a comparator circuit (6) configured to compare the measured capacitance with a predetermined reference value, to thereby detect lateral displacement of the workpiece (w) in a planar direction of the support plate (1). Further, the method of detecting lateral displacement of a workpiece (w) includes comparing the capacitance input to the comparator circuit (6) with a predetermined reference value, to thereby detect the lateral displacement of the workpiece (w). |
申请公布号 |
US2015268026(A1) |
申请公布日期 |
2015.09.24 |
申请号 |
US201314434805 |
申请日期 |
2013.10.01 |
申请人 |
CREATIVE TECHNOLOGY CORPORATION |
发明人 |
Sugawara Toshifumi;Kim Eunsun;Tatsumi Yoshiaki |
分类号 |
G01B7/00;G01D5/24;H01L21/673;G01B7/02 |
主分类号 |
G01B7/00 |
代理机构 |
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代理人 |
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主权项 |
1. A workpiece holding apparatus, which is configured to hold a workpiece with an adhesive pad mounted on a support plate, the workpiece holding apparatus comprising:
a capacitance measuring device comprising an electrode pair formed of first and second electrodes and arranged at least at a part of a position corresponding to a peripheral edge portion of the workpiece, the capacitance measuring device being configured to measure capacitance of the electrode pair; and a comparator circuit configured to compare the measured capacitance with a predetermined reference value, to thereby detect lateral displacement of the workpiece in a planar direction of the support plate. |
地址 |
Kawasaki-shi, Kanagawa JP |