| 摘要 |
[Problem] To provide a nitrogen heating unit capable of preventing the coagulation and deposition of a sublimation material and capable of being installed with ease in already-operating facilities. [Solution] Provided is a nitrogen heating unit (1) comprising: a first cylindrical tube (12) into which room temperature nitrogen gas is introduced from a nitrogen gas supply unit (30) for dilution; a heating container (11) connected to the first cylindrical tube and provided with a heating unit (14) located on an axis of the inner space of the heating container (11); and a second cylindrical tube (13) for discharging the heated nitrogen gas, the second cylindrical tube (13) being connected to the heating container. The nitrogen heating unit (1) is installed on a nitrogen gas supply path from the nitrogen gas supply unit to a dry vacuum pump (31). |
