发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 Provided is a method for manufacturing a semiconductor device. According to the method, a first bonding layer, a first release layer, a second bonding layer and a second release layer can be sequentially arranged between a carrier and a device wafer. All of the first bonding layer, the first release layer, the second bonding layer and the second release layer can be made of thermosetting resin.
申请公布号 WO2015140595(A1) 申请公布日期 2015.09.24
申请号 WO2014IB59958 申请日期 2014.03.19
申请人 SAMSUNG ELECTRONICS CO., LTD.;KANG, UN-BYOUNG;SOHN, JOONSIK;AHN, JUNG-SEOK;LEE, CHUNGSUN;CHO, TAEJE 发明人 KANG, UN-BYOUNG;SOHN, JOONSIK;AHN, JUNG-SEOK;LEE, CHUNGSUN;CHO, TAEJE
分类号 H01L21/58;H01L21/304 主分类号 H01L21/58
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