VIBRATION REDUCTION APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

摘要

The present invention provides a vibration reduction apparatus which reduces a vibration of a target object supported on a base, comprising a first object supported by a first elastic member on the base, a second object supported by a second elastic member on the first object, a detection unit including a sensor having a first electrode provided on the first object and a second electrode provided on the second object, and a processor configured to obtain a distance between the first electrode and the second electrode using the sensor, a first driving unit configured to drive the first object, a first control unit configured to control the distance between the first electrode and the second electrode constant based on a detection result, wherein the second electrode and the processor are electrically connected to each other via the second elastic member.

主权项

1. A vibration reduction apparatus which reduces a vibration of a target object supported on a base, the apparatus comprising:
a first object supported by a first elastic member on the base; a second object supported by a second elastic member on the first object; a detection unit including a sensor having a first electrode provided on the first object and a second electrode provided on the second object, and a processor configured to obtain a distance between the first electrode and the second electrode using the sensor; a first driving unit arranged between the base and the first object, and configured to drive the first object; a first control unit configured to control the first driving unit so as to make the distance between the first electrode and the second electrode constant based on a detection result by the detection unit; a second driving unit arranged between the base and the target object, and configured to drive the target object; and a second control unit configured to control the second driving unit so as to make a distance between the target object and the second object constant, wherein the second electrode and the processor are electrically connected to each other via the second elastic member.