发明名称 半導体装置の製造方法及び製造装置
摘要 <p>According to one embodiment, a semiconductor device manufacturing method includes: bonding a first wafer and a second wafer to each other, to form a stack; rubbing a film attached with a fill material in a thin-film shape into a gap located between a bevel of the first wafer and a bevel of the second wafer, to fill the gap with the fill material; and thinning the first wafer.</p>
申请公布号 JP5784658(B2) 申请公布日期 2015.09.24
申请号 JP20130039025 申请日期 2013.02.28
申请人 发明人
分类号 H01L21/304 主分类号 H01L21/304
代理机构 代理人
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