发明名称 グラフェン配線構造
摘要 <p>First, a substrate body (12) is prepared, and an Ni crystalline layer (14) is formed over the entire surface of the substrate body (12). Next, the crystalline layer (14) is patterned into a zigzag shape using a lithography method, making a catalytic metal layer (16). Next, C atoms are supplied to the catalytic metal layer (16) using an acetylene/argon mixed gas. This causes the Ni surface to be rearranged into a surface (111), and the supplied C atoms to form a hexagonal lattice and graphene to grow. The graphene is formed on the catalytic metal layer (16), thus becoming the same shape as the catalytic metal layer (16), a zigzag shape. Next, square electrodes (18, 20) are attached to both ends of the zigzag-shaped graphene. Then, the catalytic metal layer (16) is dissolved in an acidic solution, and the graphene is removed as graphene material (10).</p>
申请公布号 JP5783530(B2) 申请公布日期 2015.09.24
申请号 JP20110163193 申请日期 2011.07.26
申请人 发明人
分类号 C01B31/02;H01B7/00 主分类号 C01B31/02
代理机构 代理人
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