IN-LINE GERMANIUM AVALANCHE PHOTODETECTOR

摘要

A method for manufacturing a photodetector including growing a quantity of germanium within an optical pathway of a waveguide. The detection of a current caused by an interaction between the optical signal and the germanium is used to indicate the presence of an optical signal passing through the waveguide.

主权项

1. A method for manufacturing a photodetector comprising:
creating a silicon waveguide; creating an N-type implant region adjacent to the waveguide: creating a P-type implant region adjacent to-the waveguide; growing a layer of germanium in the waveguide wherein an optical signal interacts with the layer of germanium and continues to travel through the waveguide; and installing a plurality of electrical connections to the N-type implant region and the P-type implant region.