主权项 |
1. A pressure sensor comprising:
a support section; a film section supported by the support section, being deformable, and including a first film and a second film, the first film including a first region located in a central part and a second region located in a peripheral part around the first region, and the second film being provided on the first region; and a strain sensing element provided on part of the second region and including:
a first magnetic layer with a magnetization changing in response to deformation of the second region;a second magnetic layer; andan intermediate layer provided between the first magnetic layer and the second magnetic layer. |