ANGULAR VELOCITY SENSOR ELEMENT AND ANGULAR VELOCITY SENSOR

摘要

PROBLEM TO BE SOLVED: To provide an angular velocity sensor used in various kinds of electronic apparatuses and an angular velocity sensor element used therefor, which are intended to improve the detection level.SOLUTION: The angular velocity sensor has a drive arm 11 one end of which is connected to a fixed part 9 and the other end is connected to a weight part 10. The drive arm 11 has a structure in which arm sides 11a and 11b extending in a direction perpendicular to a direction connecting the fixed part 9 and the weight part 10 are folded back.