发明名称 ワイヤソー装置及び切断加工方法
摘要 <p><P>PROBLEM TO BE SOLVED: To suppress local tension variation of a wire caused during swinging cutting. <P>SOLUTION: There is provided a wire saw apparatus 1 which cuts a workpiece W by pressing the workpiece against a cutting wire 3 which swings while reciprocally traveling. The wire saw apparatus includes: a wire guide support part 4 which swings; a pair of wire guides 2, 2 disposed at the wire guide support part 4; a wire group 3a formed between the pair of wire guides 2, 2 by winding the cutting wire 3 around the pair of wire guides 2, 2; a wire supply device 6 and a wire winding device 7 capable of unwinding and winding the cutting wire 3; a workpiece holding part 50 which is displaced to press the workpiece W against the wire group 3a; and a controller 8. The controller 8 has traveling speed control means 8a controlling the traveling speed of the cutting wire 3, and swinging speed control means 8b controlling an increase or a decrease in swinging speed of the wire guide support part 4 according to an increase or a decrease in the traveling speed of the cutting wire 3. <P>COPYRIGHT: (C)2013,JPO&INPIT</p>
申请公布号 JP5784976(B2) 申请公布日期 2015.09.24
申请号 JP20110109054 申请日期 2011.05.16
申请人 发明人
分类号 B24B27/06;B28D5/04;H01L21/304 主分类号 B24B27/06
代理机构 代理人
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