Acoustic Transducer with Gap-Controlling Geometry and Method of Manufacturing an Acoustic Transducer

摘要

A transducer of the preferred embodiment including a transducer and a plurality of adjacent, tapered cantilevered beams. Each of the beams define a beam base, a beam tip, and a beam body disposed between the beam base and the beam tip. The beams are arranged such that each of the beam tips extends toward a common area. Each beam is joined to the substrate along the beam base and is free from the substrate along the beam body. A preferred method of manufacturing a transducer can include: depositing alternating layers of piezoelectric and electrode onto the substrate in block, processing the deposited layers to define cantilever geometry in block, depositing metal traces in block, and releasing the cantilevered beams from the substrate in block.

主权项

1. A MEMS transducer comprising:
a substrate; a plurality of adjacent, tapered cantilevered beams, each defining a beam base, a beam tip, and a beam body disposed between the beam base and the beam tip, arranged such that each of the beam tips extends toward a common area, and further such that each beam is joined to the substrate along the beam base and is free from the substrate along the beam body.