GAS-PHASE REACTOR AND SYSTEM HAVING EXHAUST PLENUM AND COMPONENTS THEREOF

摘要

An improved exhaust system for a gas-phase reactor and a reactor and system including the exhaust system are disclosed. The exhaust system includes a channel fluidly coupled to an exhaust plenum. The improved exhaust system allows operation of a gas-phase reactor with desired flow characteristics while taking up relatively little space within a reaction chamber.

主权项

1. A gas-phase reactor comprising
a reaction chamber comprising a top surface, a bottom surface, a sidewall, and an interior region formed between the top surface, the bottom surface, and the sidewall; a susceptor within the interior region, the susceptor comprising a side perimeter; a channel formed between the side perimeter and the sidewall; and a plenum within the interior region and beneath the susceptor, the plenum fluidly coupled to the channel.