RETICLE POD WITH COVER TO BASEPLATE ALIGNMENT SYSTEM

摘要

An alignment system for aligning the cover and base of an inner pod of a reticle carrier. The cover and base can each be provided with hard planar surface seal zones on the bottom surface and the top surface, respectively. The cover of the inner pod may be provided with a through hole or a blind hole into which an alignment pin is disposed. The base is provided with a guide recess to receive the distal end of the alignment pin. The alignment pin operates to limit contact surface area between the cover and the base during that is in sliding contact, thus inhibiting particulate generation. Low particulate-generating materials, such as stainless steel or polyamide-imide, can also be utilized to further reduce particulate generation. Furthermore, the cover and base can each be unitary without need for fastening components thereto, thereby eliminating clamped surfaces that can entrap and subsequently shed particulates.

主权项

1. A reticle carrier for containment of a reticle, comprising:
an outer pod assembly including an upper portion and a lower portion that cooperate to define an enclosure; and an inner pod assembly for storage of a reticle therein, said inner pod assembly being adapted for containment within said enclosure of said outer pod assembly, said inner pod assembly including: a cover and a base concentric about a central axis, said central axis defining an axial direction, and an alignment system including structure defining a hole provided in one of said cover and said base, a guide recess formed proximate an edge of the other of said cover and said base, and an alignment pin disposed in said hole; wherein said alignment pin is disposed in said guide recess when said cover and base are engaged, said guide recess being adapted to guide said alignment pin when said cover is moved in said axial direction toward said base for alignment of said cover with said base.