发明名称 表面を高精度で測定する方法及び装置
摘要 <p>A device and a method for measuring at least one surface section of an object that is mounted on a carrier includes at least one reference object that can be fixed relative to the carrier, and a holder that can be moved relative to the reference object in at least one first direction and on which a reference body and a distance measuring device are arranged. The reference body and the distance measuring device are mounted in a rotatable manner relative to each other. The distance measuring device is designed to determine a first distance to a first point of the surface section of the object and a second distance to a second point of the reference body wherein the second point corresponds to the first point.</p>
申请公布号 JP5784150(B2) 申请公布日期 2015.09.24
申请号 JP20130552884 申请日期 2012.02.08
申请人 发明人
分类号 G01B11/24;G01B21/00;G01B21/20 主分类号 G01B11/24
代理机构 代理人
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