发明名称 VERTICAL NITRIDE SEMICONDUCTOR DEVICE
摘要 A vertical semiconductor device and a method of forming the same. A vertical semiconductor device has a substrate that includes a first material, a first electrode below the substrate, and at least one semiconductor region. The at least one semiconductor region includes a second material different from the first material. The second material is a III-nitride semiconductor material. The at least one semiconductor region is formed over the substrate. The vertical semiconductor device also has a second electrode over the at least one semiconductor region.
申请公布号 US2015270356(A1) 申请公布日期 2015.09.24
申请号 US201514662837 申请日期 2015.03.19
申请人 Massachusetts Institute of Technology 发明人 Palacios Tomas Apostol;Zhang Yuhao
分类号 H01L29/20;H01L21/02;H01L21/283;H01L29/417 主分类号 H01L29/20
代理机构 代理人
主权项 1. A vertical semiconductor device, comprising: a substrate comprising a first material; a first electrode below the substrate; at least one semiconductor region comprising a second material different from the first material, the second material being a III-nitride semiconductor material, the at least one semiconductor region being formed over the substrate; and a second electrode over the at least one semiconductor region.
地址 Cambridge MA US