发明名称 |
INTEGRATED CIRCUIT COUPLING SYSTEM WITH WAVEGUIDE CIRCUITRY AND METHOD OF MANUFACTURE THEREOF |
摘要 |
A method of manufacture of an integrated circuit coupling system includes: forming a waveguide assembly, having a top clad over an open end of an optical core; forming a first photoresist having a base photoresist pattern shape with sloped photoresist sidewalls tapered down to expose a portion of the top clad; forming a recess having clad sidewalls from the portion of the top clad exposed by the base photoresist pattern shape, the clad sidewalls having a shape replicating a shape of the base photo resist pattern shape; and forming an optical vertical insertion area, from the clad sidewalls forming the recess, having a pocket trench, a horizontal step, and a mirror with a reflective material selectively applied to a section of the clad sidewalls and exposing the open end opposite to the mirror, the horizontal step between the mirror and the pocket trench. |
申请公布号 |
EP2798389(A4) |
申请公布日期 |
2015.09.23 |
申请号 |
EP20120863185 |
申请日期 |
2012.12.27 |
申请人 |
NEOPHOTONICS CORPORATION |
发明人 |
WON, JONGIK;TSENG, HSIANG EN;MARTINEZ, LUIS;TICKNOR, ANTHONY J. |
分类号 |
G02B6/13;B29D11/00;G02B6/02;G02B6/136;G02B6/30;G02B6/42 |
主分类号 |
G02B6/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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