FLUID CONTROL DEVICE AND STRUCTURE FOR INSTALLING THERMAL SENSOR AT FLUID CONTROL DEVICE

摘要

The present invention provides a fluid control apparatus which allows installation of a thermal sensor for temperature control by a simple work by an effective utilization of a space in the fluid control apparatus, and a thermal sensor installation structure with respect to the fluid control apparatus. The fluid control apparatus 1 includes a first fluid control instrument 3 and a second fluid control instrument 4 adjacent to each other and the thermal sensor 17 configured to measure a temperature of a fluid flowing in the first fluid control instrument 3. The fluid control apparatus 1 further includes a supporting member 19 configured to support the thermal sensor 17 attached to the second fluid control instrument 4.