发明名称 Beam transforming element, illumination optical apparatus, exposure apparatus, and exposure method
摘要 <p>A light optical device capable of forming a bracelet-form lighting pupil distribution in a peripherally-polarized state with a light quantity loss satisfactorily controlled, the device comprising a light flux conversion element (50) for forming a bracelet-form light intensity distribution on a specified surface based on an incident light flux. The light flux conversion element comprises a first basic element (50A) formed of an optically-rotating material, for forming a first arcuate area distribution based on an incident light flux out of bracelet-form light intensity distribution, a second basic element (50B) for forming a second arcuate area distribution, a third basic element (50C) for forming a third arcuate area distribution, and fourth basic element (50D) for forming a fourth arcuate area distribution. Responsive basic elements have mutually different thickness along the light transmitting direction.</p>
申请公布号 EP2251896(B1) 申请公布日期 2015.09.23
申请号 EP20100174843 申请日期 2004.11.02
申请人 NIKON CORPORATION 发明人 TOYODA, MITSUNORI
分类号 H01L21/027;G02B19/00;G02B27/00;G02B27/28;G02B27/44;G03F7/20 主分类号 H01L21/027
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