发明名称 |
SEMICONDUCTOR DEVICE, DISPLAY DEVICE INCLUDING THE SEMICONDUCTOR DEVICE, DISPLAY MODULE INCLUDING THE DISPLAY DEVICE, AND ELECTRONIC APPLIANCE INCLUDING THE SEMICONDUCTOR DEVICE, THE DISPLAY DEVICE, AND THE DISPLAY MODULE |
摘要 |
The assignment of the present invention, regarding a semiconductor device including a transistor having an oxide semiconductor, is to inhibit change of electrical properties and improve reliability at the same time. As a semiconductor device including a transistor, the transistor is formed on the top of a first insulation film, which comprises: an oxide semiconductor film on the top of the first insulation film; a gate insulation film on the top of the oxide semiconductor film; a gate electrode on the gate insulation film; a second insulation film on the oxide semiconductor film and the gate electrode; and a source electrode and a drain electrode electronically accessed with the oxide semiconductor film. The oxide semiconductor film has a first area adjacent to the gate insulation film and a second area adjacent to the second insulation film, with the first insulation film having oxygen and the second insulation film having hydrogen, and the first insulation film having a third area overlapped with the first area and a fourth area overlapped with the second area, wherein a concentration of element of impurities of the fourth area is higher than the third area. |
申请公布号 |
KR20150107622(A) |
申请公布日期 |
2015.09.23 |
申请号 |
KR20150032764 |
申请日期 |
2015.03.09 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
YAMAZAKI SHUNPEI;KOEZUKA JUNICHI;SHIMA YUKINORI;JINTYOU MASAMI;KUROSAKI DAISUKE;NAKADA MASATAKA |
分类号 |
H01L29/786 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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