发明名称 |
OXIDE SINTER, SPUTTERING TARGET USING SAME, AND OXIDE FILM |
摘要 |
To provide an oxide sintered body for a sputtering target, which is capable of adding specific elements to from an n-type semiconductor layer to a p-type semiconductor layer surface of a compound thin-film solar cell. An oxide sintered body which contains zinc (Zn) and at least one type of element (X) (excluding a case where magnesium is added alone) that has an ionization potential Ip of 4.5 eV‰¦Ip‰¦8.0 eV and an atomic radius d of 1.20 ʼn¦d‰¦2.50 Å and which has a composition ratio (atomic ratio) of 0.0001‰¦X/(Zn+X)‰¦0.20 and a sintered density of at least 95%. |
申请公布号 |
EP2921467(A1) |
申请公布日期 |
2015.09.23 |
申请号 |
EP20130855320 |
申请日期 |
2013.11.18 |
申请人 |
TOSOH CORPORATION |
发明人 |
AKIIKE, RYO;KURAMOCHI, HIDETO;TAMANO, KIMIAKI |
分类号 |
C04B35/453;C23C14/34;H01L31/06 |
主分类号 |
C04B35/453 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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