发明名称 OXIDE SINTER, SPUTTERING TARGET USING SAME, AND OXIDE FILM
摘要 To provide an oxide sintered body for a sputtering target, which is capable of adding specific elements to from an n-type semiconductor layer to a p-type semiconductor layer surface of a compound thin-film solar cell. An oxide sintered body which contains zinc (Zn) and at least one type of element (X) (excluding a case where magnesium is added alone) that has an ionization potential Ip of 4.5 eV‰¦Ip‰¦8.0 eV and an atomic radius d of 1.20 ʼn¦d‰¦2.50 Å and which has a composition ratio (atomic ratio) of 0.0001‰¦X/(Zn+X)‰¦0.20 and a sintered density of at least 95%.
申请公布号 EP2921467(A1) 申请公布日期 2015.09.23
申请号 EP20130855320 申请日期 2013.11.18
申请人 TOSOH CORPORATION 发明人 AKIIKE, RYO;KURAMOCHI, HIDETO;TAMANO, KIMIAKI
分类号 C04B35/453;C23C14/34;H01L31/06 主分类号 C04B35/453
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