Liquid precursor for deposition of indium selenide and method of preparing the same

摘要

Liquid precursors containing indium and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and method of depositing a liquid precursor on a substrate are also disclosed.

主权项

1. A method of preparing a liquid indium selenide precursor, the method comprising:
reducing elemental selenium with a stoichiometric amount of hydrazine in the presence of a first solvent to yield a first solution comprising Se22−; and combining the first solution with a second solution comprising an indium salt and a second solvent to yield the liquid indium selenide precursor comprising a suspension of indium selenide particles, wherein the liquid indium selenide precursor is substantially hydrazine-free.