Quantitative sensor and manufacturing method thereof

摘要

A quantitative sensor and manufacture method thereof are disclosed. This quantitative sensor has a dual-mode film bulk acoustic resonator structure to achieve desirable performances in sensitivity, accuracy and efficiency. Furthermore, this quantitative sensor serves as a fluid sensor when a fluid detection metal layer is formed in a sample-receiving chamber; and this quantitative sensor may also serve as a bio sensor when biocompatible metal layer and a bio-sensing layer are formed in the sample-receiving chamber instead of the fluid detection metal layer.

主权项

1. A quantitative sensor, comprising:
a substrate having a chamber linking two opposite sides of the substrate, with one of the two opposite sides being a coupling side, wherein the chamber is adapted to be filled with liquid to be detected; a first electrode layer mounted on the coupling side of the substrate and in communication with the chamber; a piezoelectric layer mounted on the first electrode layer and having a growing direction, wherein there is an angle between a surface of the coupling side and the said growing direction, and the angle is 75-45 degrees; a second electrode layer formed on the piezoelectric layer and separated from the first electrode layer; a binding metal layer disposed in the chamber and mounted on the first electrode layer; and a fluid detection metal layer disposed in the chamber and mounted on the binding metal layer.