Sensor comprising a multi-layered ceramic substrate and method for its production

摘要

A sensor comprises a preferably multi-layer ceramic substrate (2) and at least one sensor element (1) arranged in, at, or on the ceramic substrate (2). The sensor element (1) can be contacted via a metallic contact (6), with the metallic contact (6) being produced via a soldering connection, which electrically connects the contact (6) with the sensor element (1) and here generates a fixed mechanic connection of the contact (6) in reference to the ceramic substrate (2). Furthermore, a method is claimed for producing the sensor according to the invention.

主权项

1. Sensor comprising a multi-layered ceramic substrate (2) and at least one sensor element (1), arranged at least one of in, at, and on the ceramic substrate (2), which can be contacted via a metallic contact (6), with the metallic contact (6) being produced by a solder connection, which electrically connects the metallic contact (6) with the sensor element (1) and generates a fixed mechanical connection of the metallic contact (6) in reference to the ceramic substrate (2), wherein the sensor element (1) serves for at least one of an inductive and capacitive path/distance/position measurement, with the contacting being formed at least one of in reference to one or more coils and in reference to one or more electrode areas (4), wherein the metallic contact (6) is embodied as at least one of a pin, a bolt, or the like inserted into a blind hole in the ceramic substrate (2), wherein an end of the metallic contact (6) is facing a layer of the multi-layered ceramic surface carrying a conductor, and wherein the metallic contact (6) is electrically connected to the conductor.