High vacuum OLED deposition source and system

摘要

Sources, devices, and techniques for deposition of organic layers, such as for use in an OLED, are provided. A vaporizer may vaporize a material between cooled side walls and toward a mask having an adjustable mask opening. The mask opening may be adjusted to control the pattern of deposition of the material on a substrate, such as to correct for material buildup that occurs during deposition. Material may be collected from the cooled side walls for reuse.

主权项

1. A device comprising:
a first thermal vaporizer; a mask assembly comprising an adjustable mask opening and disposed not more than a distance 5 W from the first thermal vaporizer, wherein W is the width of the mask assembly; and a first plurality of cooled side walls disposed between the first thermal vaporizer and the mask assembly and defining a material sublimation region.