发明名称 Semiconductor nano layer structure and manufacturing method thereof
摘要 A method for manufacturing a semiconductor nano layer structure includes: two substrates are provided; a plurality of semiconductor nanowires are formed on one of the substrates; an absorption surface is formed on the other substrate; one of the substrates is fixed on a cylindrical roller, the cylindrical roller is brought into contact with a surface of the substrate which is stationary and is not fixed on the cylindrical roller, and rolled with a constant velocity and pressure so that the semiconductor nanowires are break, detached, transferred and absorbed, and a semiconductor nano layer structure is formed on the stationary substrate; a de-laminating process is performed to separate the semiconductor nano layer structure from the second substrate; an electric Joule heat welding process is locally performed to bond each of the semiconductor nanowires of the semiconductor nano layer structure or each semiconductor nano layer structure.
申请公布号 US9142410(B2) 申请公布日期 2015.09.22
申请号 US201414335994 申请日期 2014.07.21
申请人 TUNGHAI UNIVERSITY 发明人 Hsiao Hsi-Lien
分类号 H01L21/02;B82Y40/00;H01L29/06;B82Y10/00 主分类号 H01L21/02
代理机构 CKC & Partners Co., Ltd. 代理人 CKC & Partners Co., Ltd.
主权项 1. A method for manufacturing a semiconductor nano layer structure, comprising: providing a solution having a plurality of semiconductor nanowires; locating a filter and a screening membrane in the solution; flowing, the solution and activating the screening membrane relative to the filter to crossly arrange the semiconductor nanowires on the filter via the screening membrane; forming at least one semiconductor membrane by crossly arranging the semiconductor nanowires on the filter, wherein each of the semiconductor nanowires is crossly interweaved with one another at a specified angle or any angles; stacking or connecting each semiconductor membrane to form a semiconductor nano layer structure; performing a drying process for removing water; lifting-off the semiconductor nano layer structure from the filter; locally performing an electric Joule heat welding process to bond each of the semiconductor nanowires of the semiconductor nano layer structure or each semiconductor nano layer structure.
地址 Taichung TW