Apparatus for harvesting and storing piezoelectric energy and manufacturing method thereof

摘要

Disclosed are an apparatus for harvesting/storing piezoelectric energy, including: a substrate having a groove at a side thereon; a piezoelectric MEMS cantilever having an end fixed to the substrate and the other end floating above the groove, and configured to convert and store an external vibration into electric energy; and a mass formed at one end of the piezoelectric MEMS cantilever and configured to apply a vibration, and a manufacturing method thereof.

主权项

1. An apparatus for harvesting/storing piezoelectric energy, comprising:
a substrate having a groove at a side thereon; and a piezoelectric MEMS cantilever having an end fixed to the substrate and the other end floating above the groove, and configured to convert and store an external vibration into electric energy, wherein the piezoelectric MEMS cantilever includes: a capacitor configured to remove ripple of voltage; a first electrode formed on the capacitor; a thin film battery formed on the first electrode; a second electrode formed on the thin film battery; a piezoelectric layer formed on the second electrode; and a third electrode formed on the piezoelectric layer.