Apparatus and method for making OLED lighting device

摘要

An apparatus for depositing one or more organic material layers of an OLED lighting device upon a first region of a substrate and one or more conducting layers upon a second region, wherein the conducting layers partially or completely cover and extend beyond one side of the organic layers, comprising: a reusable mask in contact with the substrate, at least one mask open area having an overhang feature; one or more sources of vaporized organic material, selected to form layers of the OLED lighting device, and the vaporized organic material plume is shaped, on the side corresponding to the mask overhang feature, so as to limit substantial transfer of organic material on said side to angles less than or equal to a selected cutoff angle to the first region; and one or more sources of vaporized conducting material that transfer conducting material to the second region, wherein the second region partially or completely overlaps the first region and extends beyond the first region on the side corresponding to the overhang feature of the mask.

主权项

1. An apparatus for depositing one or more organic material layers of an OLED lighting device upon a first region of a substrate and one or more conductive layers of the OLED lighting device upon a second region, wherein the one or more conductive layers partially or completely cover the one or more organic layers and further extend beyond one side of the one or more organic layers, the apparatus comprising:
a) a reusable mask including one or more open areas and positioned and held in contact with but not bonded to the substrate, wherein one edge of at least one mask open area is structured to include an overhang feature so as to define a masked portion, an unmasked portion, and a partially masked portion of the substrate, and wherein the unmasked portion of the substrate includes at least a portion of a first electrode and the partially masked portion of the substrate includes at least a portion of a second electrode that is non-contiguous to the first electrode; b) one or more sources of vaporized organic material, wherein the one or more sources of vaporized organic material comprise a vacuum thermal evaporation device and provide a plume of vaporized organic material comprising a selected intrinsic plume shape with an intrinsic cutoff angle greater than 60° from a centerline of the plume of vaporized organic material, and wherein the intrinsic cutoff angle defines a region about the centerline that includes 90% of a total flux of vapor of the plume of vaporized organic material; c) one or more shields located between at least one of the one or more sources of vaporized organic material and at least a portion of the substrate and located on a side of the plume of vaporized organic material corresponding to the overhang feature of the reusable mask, wherein said one or more shields serve to shape the plume of vaporized organic material on the side of the plume of vaporized organic material corresponding to the overhang feature of the reusable mask, serve to limit transfer of at least some of the plume of vaporized organic material on said side of the plume of vaporized organic material to at least one angle less than or equal to a selected cutoff angle, and serve to allow, in combination with the overhang feature of the reusable mask, at least some of an unshielded portion of the plume of vaporized organic material to reach the first region of the substrate through said reusable mask, wherein said selected cutoff angle is relative to normal to a surface of the substrate and is less than the intrinsic cutoff angle, and wherein said first region comprises the unmasked portion of the substrate; and d) one or more sources of vaporized conductive material that transfer conductive material through said reusable mask to the second region, wherein said second region corresponds at least to the unmasked portion and the partially masked portion of the substrate, wherein the one or more sources of vaporized conductive material comprise a vacuum thermal evaporation device and provide a plume of vaporized conductive material comprising substantially the same intrinsic plume shape with substantially the same intrinsic cutoff angle of greater than 60° from a centerline of the plume of vaporized conductive material as that of the plume of vaporized organic material, and wherein the second region partially or completely overlaps the first region and further extends beyond the first region on a side of the first region corresponding to the overhang feature of the reusable mask.