Method of fabrication of Al/Ge bonding in a wafer packaging environment and a product produced therefrom

摘要

A method of bonding of germanium to aluminum between two substrates to create a robust electrical and mechanical contact is disclosed. An aluminum-germanium bond has the following unique combination of attributes: (1) it can form a hermetic seal; (2) it can be used to create an electrically conductive path between two substrates; (3) it can be patterned so that this conduction path is localized; (4) the bond can be made with the aluminum that is available as standard foundry CMOS process. This has the significant advantage of allowing for wafer-level bonding or packaging without the addition of any additional process layers to the CMOS wafer.

主权项

1. A MEMS device comprising:
a first substrate including a microelectromechanical systems (MEMS) feature and a patterned germanium layer; and a second substrate, including a patterned aluminum layer, wherein the germanium of the patterned germanium layer of the first substrate is in direct contact with and matched to the aluminum of the patterned aluminum layer of the second substrate to form a contact area, wherein in the contact area the patterned aluminum layer is properly patterned to match patterned germanium layer.