| 发明名称 |
Vacuum pumping system |
| 摘要 |
The present invention relates to a vacuum pumping system (18) for evacuating gas from a plurality of chambers (12, 14, 16) at different pressures. The pumping system comprises a plurality of compound vacuum pumps (20, 22), wherein each compound pump comprises a plurality of pumping mechanisms (24,26,28) connected in series between a pump inlet (30) and a pump exhaust (32) and an interstage port (34, 36) between pumping mechanisms in the series. The system is configured such that gas evacuated from one of said chambers is pumped through the interstage ports of at least two of said compound pumps. |
| 申请公布号 |
US9140250(B2) |
申请公布日期 |
2015.09.22 |
| 申请号 |
US201113583429 |
申请日期 |
2011.02.25 |
| 申请人 |
EDWARDS LIMITED |
发明人 |
Stones Ian David;Olsen Ian;Horler Richard Glyn |
| 分类号 |
F04B37/14;F04B23/04;F04B37/02;F04B37/06;F04B41/06;F04C25/02;F04C28/02;F04C28/06;F04D19/04 |
主分类号 |
F04B37/14 |
| 代理机构 |
|
代理人 |
Mitchell Shaoni L. |
| 主权项 |
1. A vacuum pumping system for evacuating gas from a plurality of chambers at different pressures, the pumping system comprising a plurality of compound vacuum pumps, wherein each compound pump comprises a plurality of pumping mechanisms connected in series between a pump inlet and a pump exhaust and an interstage port between pumping mechanisms in the series, wherein the system is configured such that a respective interstage port of each of at least two compound pumps is connected to one of the chambers so that gas from the chamber is pumped by respective downstream pumping mechanisms of the compound pumps in parallel. |
| 地址 |
Crawley, West Sussex GB |
