发明名称 Preventing stray currents in sensors in conductive media
摘要 A sensor is provided. The sensor includes a conductive substrate having side-walls; a dielectric layer overlaying a first surface of the conductive substrate, the dielectric layer including a gate dielectric having a first thickness and a field dielectric having a second thickness; a sensing layer overlaying a first surface of the gate dielectric; a non-conductive carrier wherein a second surface of the conductive substrate overlays a portion of the non-conductive carrier; and an insulating layer conformally coating at least the side-walls of the conductive substrate, wherein a first surface of the sensing layer is uncoated by the insulating layer.
申请公布号 US9140662(B1) 申请公布日期 2015.09.22
申请号 US201414463087 申请日期 2014.08.19
申请人 Honeywell International Inc. 发明人 Carlson Robert Jon;Nohava Thomas E.
分类号 G01N27/333;G01N27/414;H01L29/06;H01L29/66 主分类号 G01N27/333
代理机构 Fogg & Powers LLC 代理人 Fogg & Powers LLC
主权项 1. A sensor comprising: a conductive substrate having side-walls; a dielectric layer overlaying a first surface of the conductive substrate, the dielectric layer including a gate dielectric having a first thickness and a field dielectric having a second thickness; a sensing layer overlaying a first surface of the gate dielectric; a non-conductive carrier wherein a second surface of the conductive substrate overlays a portion of the non-conductive carrier; and an insulating layer conformally coating at least the side-walls of the conductive substrate, wherein a first surface of the sensing layer is uncoated by the insulating layer.
地址 Morristown NJ US