发明名称 |
Preventing stray currents in sensors in conductive media |
摘要 |
A sensor is provided. The sensor includes a conductive substrate having side-walls; a dielectric layer overlaying a first surface of the conductive substrate, the dielectric layer including a gate dielectric having a first thickness and a field dielectric having a second thickness; a sensing layer overlaying a first surface of the gate dielectric; a non-conductive carrier wherein a second surface of the conductive substrate overlays a portion of the non-conductive carrier; and an insulating layer conformally coating at least the side-walls of the conductive substrate, wherein a first surface of the sensing layer is uncoated by the insulating layer. |
申请公布号 |
US9140662(B1) |
申请公布日期 |
2015.09.22 |
申请号 |
US201414463087 |
申请日期 |
2014.08.19 |
申请人 |
Honeywell International Inc. |
发明人 |
Carlson Robert Jon;Nohava Thomas E. |
分类号 |
G01N27/333;G01N27/414;H01L29/06;H01L29/66 |
主分类号 |
G01N27/333 |
代理机构 |
Fogg & Powers LLC |
代理人 |
Fogg & Powers LLC |
主权项 |
1. A sensor comprising:
a conductive substrate having side-walls; a dielectric layer overlaying a first surface of the conductive substrate, the dielectric layer including a gate dielectric having a first thickness and a field dielectric having a second thickness; a sensing layer overlaying a first surface of the gate dielectric; a non-conductive carrier wherein a second surface of the conductive substrate overlays a portion of the non-conductive carrier; and an insulating layer conformally coating at least the side-walls of the conductive substrate, wherein a first surface of the sensing layer is uncoated by the insulating layer. |
地址 |
Morristown NJ US |