| 摘要 |
The purpose of the present invention is to provide a processing method of a simple process capable of properly processing an object to be processed including metal. The prevent invention relates to a processing method for processing an object (11) to be processed including metal on at least one surface (11a) to be processed with a process means (32) having a polishing pad or a grinding wheel (40b). The method includes a processing step of polishing or grinding an object to be processed with a process means while supplying a process solution (50) to the surface to be processed of the object to be processed. The process solution includes organic acid and oxidant. |
