VERTICAL HEAT TREATMENT APPARATUS

摘要

The present invention relates to a vertical heat treatment apparatus. The vertical heat treatment apparatus includes: a main cover; a rotation part which is rotated by a motor, has one end combined with the main cover to be rotated and the other end having a concavo-convex part; a cover which is combined to the main cover and surrounds the rotation part separately; a purge part which penetrates the cover and has a purge hole near the other end of the rotation part; and a purge guide part which forms a labyrinth structure separately coupled to the concavo-convex part formed at the other end of the rotation part, and guides air pressure supplied from the purge hole from the center of the rotation part to the edge of the rotation part in the labyrinth structure.