ETCHING SOLUTION COMPOSITION FOR COPPER LAYER AND TITANIUM LAYER AND METHOD OF PREPARING ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY USING THE SAME

摘要

The present invention relates to an etching solution composition for a copper layer and a titanium layer and a method of preparing an array substrate for a liquid crystal display device using the same and, more specifically, to an etching solution composition for a copper layer and a titanium layer, which is composed of persulfate and a compound represented by the chemical formula 1 and a method of preparing an array substrate for a liquid crystal display device using the same. Therefore, the etching solution composition for a copper layer and a titanium layer has excellent temporal stability and an increased etching rate, thereby producing fine patterns by rapidly and uniformly etching multiple layers.