ROBOT AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

摘要

Disclosed in the present invention are a robot and a substrate processing apparatus including the same. The robot includes a body; an arm connected to the body; a hand base connected to the other side of the arm facing the body; a hand including a finger connected to the hand base; a vibration offsetting member arranged between the hand base and the finger or between the hand base and the arm, and offsetting vibration of the hand base or the finger.