| 摘要 |
According to one embodiment, a MEMS device includes a first variable capacitor including a first lower electrode fixed to a substrate, and a movable first upper electrode provided above the first lower electrode, a second variable capacitor including a second lower electrode fixed to the substrate, and a movable second upper electrode provided above the second lower electrode, and a connection part configured to electrically and mechanically connect the first upper electrode and the second upper electrode to each other. |
