| 发明名称 |
PRODUCTION OF TRISILYLAMINE FROM MONOCHLOROSILANE AND AMMONIA BY USE OF INERT SOLVENT |
| 摘要 |
The present invention relates to a specific process for producing trisilylamine from monochlorosilane and ammonia in the liquid phase. The invention further relates to a plant wherein such a process can be carried out with advantage. |
| 申请公布号 |
US2015259207(A1) |
申请公布日期 |
2015.09.17 |
| 申请号 |
US201514724114 |
申请日期 |
2015.05.28 |
| 申请人 |
HOPPE Carl-Friedrich;RAULEDER Hartwig;GOETZ Christian |
发明人 |
HOPPE Carl-Friedrich;RAULEDER Hartwig;GOETZ Christian |
| 分类号 |
C01B21/087;B01J19/24 |
主分类号 |
C01B21/087 |
| 代理机构 |
|
代理人 |
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| 主权项 |
|
| 地址 |
Gruendau DE |
