| 发明名称 |
METHOD FOR INSPECTING LIQUID DROPLET EJECTION APPARATUS AND METHOD FOR MANUFACTURING DEVICE |
| 摘要 |
A method for inspecting a liquid droplet ejection apparatus that ejects a liquid droplet from an ejection port includes (a) ejecting the liquid droplet toward an ejection target at an inspection drive frequency that is higher than an operation drive frequency set during a normal operation; (b) measuring a characteristic of the liquid droplet deposited on a surface of the ejection target; and (c) determining that the ejection port the characteristic of which is outside a predetermined range is defective. |
| 申请公布号 |
US2015259784(A1) |
申请公布日期 |
2015.09.17 |
| 申请号 |
US201514624800 |
申请日期 |
2015.02.18 |
| 申请人 |
Panasonic Corporation |
发明人 |
GOTO MASASHI;MIYOSHI TAKAYUKI;MURO MASAHIRO |
| 分类号 |
C23C14/24;C23C14/52 |
主分类号 |
C23C14/24 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for inspecting a liquid droplet ejection apparatus that ejects a liquid droplet from an ejection port, comprising:
(a) ejecting the liquid droplet toward an ejection target at an inspection drive frequency that is higher than an operation drive frequency set during a normal operation; (b) measuring a characteristic of the liquid droplet deposited on a surface of the ejection target; and (c) determining that the ejection port the characteristic of which is outside a predetermined range is defective. |
| 地址 |
Osaka JP |
