发明名称 CLEANING APPARATUS AND PROCESS FOR CLEANING ELECTRONIC COMPONENTS
摘要 Cleaning apparatuses for cleaning electronic components such as camera modules and electronics substrates are provided. The cleaning apparatuses have a plurality of processing zones and one or more conveyors for conveying an electronic component to each processing zone sequentially such that the electronic component is processed in-line by the processing zones. In one aspect, plasma is applied to the electronic component at atmospheric pressure at one of the processing zones. In another aspect, there is a plurality of separately controlled conveyors, and the electronic component is processed at each processing zone over a respective processing time, with at least one of the processing times being different to the other processing times.
申请公布号 US2015258585(A1) 申请公布日期 2015.09.17
申请号 US201414214869 申请日期 2014.03.15
申请人 DONG GUAN COWELL OPTIC ELECTRONICS LIMITED 发明人 PARK Gun Woo
分类号 B08B7/00;H01J37/32 主分类号 B08B7/00
代理机构 代理人
主权项 1. A cleaning apparatus for cleaning an electronic component, the cleaning apparatus comprising: a plurality of processing zones; and one or more conveyors for conveying the electronic component to each processing zone sequentially such that the electronic component is processed in-line by the processing zones; wherein at one of the processing zones, plasma is applied to the electronic component at atmospheric pressure.
地址 Dongguan City CN