SEPARATION AND REGENERATION APPARATUS AND SUBSTRATE PROCESSING APPARATUS

摘要

Disclosed is a separation and regeneration apparatus which includes a buffer tank configured to generate a mixed liquid which includes a first fluorine-containing organic solvent having a first boiling point, and a second fluorine-containing organic solvent having a second boiling point higher than the first boiling point; a distillation tank configured to heat the mixed liquid up to a temperature between the first boiling point and the second boiling point so as to separate the mixed liquid into the first fluorine-containing organic solvent in a gas state and the second fluorine-containing organic solvent in a liquid state; a first tank configured to liquefy and store the first fluorine-containing organic solvent in the gas state which is sent from the distillation tank; and a second tank configured to store the second fluorine-containing organic solvent in the liquid state which is sent from the distillation tank.

主权项

1. A separation and regeneration apparatus comprising:
a mixed liquid generating unit configured to generate a mixed liquid which includes a first fluorine-containing organic solvent having a first boiling point, and a second fluorine-containing organic solvent having a second boiling point higher than the first boiling point a distillation tank including a heater configured to heat the mixed liquid up to a temperature between the first boiling point and the second boiling point, the distillation tank being configured to separate the mixed liquid into the first fluorine-containing organic solvent in a gas state and the second fluorine-containing organic solvent in a liquid state; a first tank configured to liquefy and store the first fluorine-containing organic solvent in the gas state which is sent from the distillation tank; and a second tank configured to store the second fluorine-containing organic solvent in the liquid state which is sent from the distillation tank, wherein the distillation tank separates the mixed liquid into a liquid including the first fluorine-containing organic solvent in a large amount and a liquid including the second fluorine-containing organic solvent in a large amount in a separation ratio corresponding to a mixing ratio of the mixed liquid in the mixed liquid generating unit.