| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump, particularly a turbo molecular pump, and a method for which a stator disc has feasibly high geometrical flexibility and can be manufactured at a low cost as easily and appropriately as possible.SOLUTION: A stator disc 86 in a vacuum pump, particularly a turbo molecular pump 84, comprises at least two stator disc parts 92, preferably two stator disc half parts including a plurality of thin plate blade parts continuous in a peripheral direction and having a partial ring shape, each of the stator disc parts 92 of the partial ring shape including a plurality of thin plate partial segments 94, the thin plate partial segments 94 of the stator disc parts 92 of the partial ring shape being connected to one another via a common injection molded member 100 in an inner circumference 96 and/or an outer circumference 98. |
