发明名称 Grinding Wheel Design with Elongated Teeth Arrangement
摘要 A grinding wheel includes a base disk, and a plurality of teeth protruding beyond a surface of the base disk. The plurality of teeth is aligned to an elongated ring encircling a center of the grinding wheel.
申请公布号 US2015258657(A1) 申请公布日期 2015.09.17
申请号 US201514724916 申请日期 2015.05.29
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Su Chun-Hsing;Lin Jing-Cheng;Fu Tsei-Chung;Chang Wen-Hua;Mao Yi-Chao
分类号 B24B37/16;H01L21/67;B24B49/12;B24B7/22;B24B37/013 主分类号 B24B37/16
代理机构 代理人
主权项 1. An apparatus comprising: a grinding wheel comprising: a base disk; anda plurality of teeth protruding beyond a surface of the base disk, wherein the plurality of teeth is aligned to an elongated ring encircling a center of the grinding wheel.
地址 Hsin-Chu TW