发明名称 |
Grinding Wheel Design with Elongated Teeth Arrangement |
摘要 |
A grinding wheel includes a base disk, and a plurality of teeth protruding beyond a surface of the base disk. The plurality of teeth is aligned to an elongated ring encircling a center of the grinding wheel. |
申请公布号 |
US2015258657(A1) |
申请公布日期 |
2015.09.17 |
申请号 |
US201514724916 |
申请日期 |
2015.05.29 |
申请人 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
发明人 |
Su Chun-Hsing;Lin Jing-Cheng;Fu Tsei-Chung;Chang Wen-Hua;Mao Yi-Chao |
分类号 |
B24B37/16;H01L21/67;B24B49/12;B24B7/22;B24B37/013 |
主分类号 |
B24B37/16 |
代理机构 |
|
代理人 |
|
主权项 |
1. An apparatus comprising:
a grinding wheel comprising:
a base disk; anda plurality of teeth protruding beyond a surface of the base disk, wherein the plurality of teeth is aligned to an elongated ring encircling a center of the grinding wheel. |
地址 |
Hsin-Chu TW |