发明名称 |
SYSTEM AND METHOD FOR LITHOGRAPHIC SURFACE TEXTURING |
摘要 |
A method is provided for manufacturing an etched surface. The method includes the steps of assembling a plurality of particles on the surface of a substrate and etching the plurality of particles to vary the size and spacing of the particles on the surface of the substrate. The method further includes depositing a mask material on the substrate including the etched particles, removing the etched particles from the substrate, thereby exposing the substrate beneath the plurality of particles, and selectively etching the substrate exposed after removal of the plurality of particles. |
申请公布号 |
WO2015138595(A1) |
申请公布日期 |
2015.09.17 |
申请号 |
WO2015US19939 |
申请日期 |
2015.03.11 |
申请人 |
ARIZONA BOARD OF REGENTS ON BEHALF OF ARIZONA STATE UNIVERSITY |
发明人 |
CHOI, JEAYOUNG;HONSBERG, CHRISTIANA |
分类号 |
C23F1/00;B82B3/00 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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