| 摘要 |
The present invention is a pressure sensor (1) for detecting pressure fluctuation, the pressure sensor being provided with a cantilever (4) that bends in accordance with the pressure difference between the inside and outside of a cavity in a sensor main body and a first gap (21), second gap (22), and third gap (23) that are formed at the proximal end (4a) of the cantilever. The first to third gaps electrically partition, in a second direction (X2) that is orthogonal to a first direction (X1) connecting the proximal end and the leading end (4b) of the cantilever in a planar view, the proximal end of the cantilever into a first support part (24) and second support part (25) and a first displacement detection part (26) and second displacement part (27). Between the first and second support parts, the first and second displacement detection parts detect displacement corresponding to the cantilever bending. |
