| 发明名称 |
Method of Fabricating Sample Support Membrane |
| 摘要 |
A method of fabricating a sample support membrane used to support an electron microscope sample starts with forming a first layer on a first layer of a substrate (S100). A second surface of the substrate that faces away from the first surface is etched to form an opening that exposes the first layer (S102). A second layer is formed on the first layer (S104). The region of the first layer that overlaps the opening as viewed within a plane is removed to expose the second layer (S106). |
| 申请公布号 |
US2015259785(A1) |
申请公布日期 |
2015.09.17 |
| 申请号 |
US201514657059 |
申请日期 |
2015.03.13 |
| 申请人 |
JEOL Ltd. |
发明人 |
Konyuba Yuji |
| 分类号 |
C23C14/24;C23C14/48;C23C14/34;C23C16/44 |
主分类号 |
C23C14/24 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of fabricating a sample support membrane used to support an electron microscope sample, said method comprising the steps of:
forming a first layer on a first surface of a substrate; etching a second surface of the substrate that faces away from the first surface to form an opening which exposes the first layer; forming a second layer on the first layer; and removing a region of the first layer that overlaps the opening as viewed within a plane to expose the second layer. |
| 地址 |
Tokyo JP |
