DEPOSITION APPARATUS, METHOD FOR CONTROLLING SAME, DEPOSITION METHOD USING DEPOSITION APPARATUS, AND DEVICE MANUFACTURING METHOD

摘要

This deposition apparatus that codeposits different deposition materials is provided with: a chamber having a subject on which deposition materials are to be deposited is disposed therein; a first deposition source that discharges vapor of a first deposition material toward the subject; a second deposition source that discharges vapor of a second deposition material toward the subject; a first heating unit that heats the first deposition material; a second heating unit that heats the second deposition material; and a heating control unit that controls the first heating unit and the second heating unit. The heating control unit is configured to control the first and second heating units such that temperature increase of the second deposition material starts a predetermined time later than temperature increase of the first deposition material.