| 摘要 |
PROBLEM TO BE SOLVED: To accurately detect the depth of a heat generation point in an integrated circuit without depending on its state or position.SOLUTION: A heat generation point detection method comprises: steps S01, S02 of applying a bias voltage of low frequency to an integrated circuit S and acquiring a heat generation detection signal detected from the integrated circuit S according to the application; steps S03, S04 of supplying the integrated circuit S with a bias voltage of high frequency and acquiring a heat generation detection signal detected from the integrated circuit S according to the supply; steps S05-S07 of detecting a phase difference between the bias voltage of low frequency and the heat generation detection signal and a phase difference between the bias voltage of high frequency and the heat generation detection signal; and a step S08 of calculating, on the basis of these phase differences, a change rate in phase difference relative to the square root of the frequency of the bias voltage and obtaining depth information on the heat generation point from the change rate. |
