METHOD AND DEVICE FOR FORMING RECTANGULAR PATTERNED STACK IMPRINT TEMPLATE, AND DEVICE PROVIDED WITH INTEGRATED RECTANGULAR PATTERNED STACK IMPRINT TEMPLATE

摘要

PROBLEM TO BE SOLVED: To provide a method and device for forming a rectangular patterned stack imprint template, and a device provided with an integrated rectangular patterned stack imprint template.SOLUTION: The embodiments disclose an analyzer configured to determine positions of circumferential gratings track features and alignment patterns in a first template, and a phase device configured to determine positions of radial gratings features and interspersed pattern fields in a second template. The first template is transferred and cross-imprinted with the second template features and patterns to form a third template substrate as a rectangular patterned stack imprint template.