| 摘要 |
<p>PROBLEM TO BE SOLVED: To make it possible to detect an origin point of a cutting blade in a cutting direction with respect to a sub-chuck table with a simple constitution.SOLUTION: A detection method for an origin position is a method for detecting an origin point of a cutting blade (52) in a cutting direction with respect to a sub-chuck table (4) disposed in vicinity of a chuck table (3). According to the method, an origin position (Z) of the cutting blade with respect to the chuck table is detected by contact type origin position detection, a focus position (Z) of imaging means (55) with respect to a holding surface (33) of the chuck table is detected, a positional relationship (ΔZ) between the origin position of the cutting blade with respect to the chuck table and the focus position of the imaging means is calculated, a focus position (Z) of the imaging means with respect to a holding surface (42) of the sub-chuck table is detected, and an origin position (Z) of the cutting blade with respect to the sub-chuck table is detected on the basis of the positional relationship.</p> |
